Manufacturing method of array substrate

    公开(公告)号:US11798959B2

    公开(公告)日:2023-10-24

    申请号:US16965495

    申请日:2019-07-22

    IPC分类号: H01L27/00 H01L27/12

    CPC分类号: H01L27/1288 H01L27/1248

    摘要: Provided are an array substrate and a manufacturing method thereof, the manufacturing method includes: forming a first active layer on a base substrate; forming a second active layer; forming a second gate on the second active layer; forming a first insulating layer covering the first active layer on the second gate; patterning the first insulating layer to form first via holes at both sides of the second gate to expose the second active layer; depositing a first metal layer in the first via holes and on the first insulating layer; patterning the first metal layer, removing a part of the first metal layer above the first active layer to expose the first insulating layer; etching the first insulating layer using the patterned first metal layer as a mask, forming second via holes above the first active layer to expose the first active layer; cleaning the exposed first active layer.

    THIN FILM TRANSISTOR, GATE ON ARRAY CIRCUIT AND ARRAY SUBSTRATE

    公开(公告)号:US20220344480A1

    公开(公告)日:2022-10-27

    申请号:US17755380

    申请日:2021-05-19

    IPC分类号: H01L29/417 H01L29/786

    摘要: The present disclosure provides a thin film transistor, a GOA circuit and an array substrate, the thin film transistor including a source electrode, including a source electrode wiring and a plurality of source electrode branches; a drain electrode, including a drain electrode wiring and a plurality of drain electrode branches; a gate; a semiconductor layer including a plurality of semiconductor branches; a plurality of source electrode branches. The plurality of drain electrode branches are in contact with the plurality of semiconductor branches and are divided into a plurality of cells; the source electrode wiring and the drain electrode wiring are arranged in a parallel and spaced apart, and the number m of one of the source electrode wiring and the drain electrode wiring is an integer greater than or equal to 2, and the number n of the other is an integer greater than or equal to 1.

    Micro-channel structure, sensor, micro-fluidic device, lab-on-chip device, and method of fabricating micro-channel structure

    公开(公告)号:US11219899B2

    公开(公告)日:2022-01-11

    申请号:US16475035

    申请日:2018-08-01

    IPC分类号: B60L3/00 G01N27/414 B01L3/00

    摘要: The present application provides a micro-channel structure. The micro-channel structure includes a base substrate; a rail layer on the base substrate and including a first rail and a second rail spaced apart from each other; and a wall layer on a side of the rail layer distal to the base substrate, and including a first wall and a second wall at least partially spaced apart from each other, thereby forming a micro-channel between the first wall and the second wall. The micro-channel has an extension direction along a plane substantially parallel to a main surface of the base substrate, the extension direction being substantially parallel to extension directions of the first rail and the second rail along the plane substantially parallel to the main surface of the base substrate.

    Oxide semiconductor composition, manufacturing method thereof, thin film transistor and display apparatus

    公开(公告)号:US10889504B2

    公开(公告)日:2021-01-12

    申请号:US16344000

    申请日:2018-09-17

    IPC分类号: C01G15/00 H01L29/786

    摘要: An oxide semiconductor composition for use in thin film transistors includes indium oxide, zinc oxide, and an oxide including a doping element of scandium, such as scandium oxide. A molar percentage of the indium oxide can be larger than approximately 50%. The oxide semiconductor composition can have a formula of In2Sc2ZnO7. Manufacturing of the oxide semiconductor composition can include: mixing indium oxide powder, scandium oxide powder, and zinc oxide powder to thereby obtain an oxide shaped object; and sintering the oxide shaped object to form the oxide semiconductor composition. A thin-film transistor for use in a semiconductor device, such as a display apparatus, can include the oxide semiconductor composition, and can thereby have improved mobility of the oxide semiconductor due to the reduced oxygen vacancy therein.

    Oxide thin film transistor, array substrate, and preparation methods thereof

    公开(公告)号:US20200185535A1

    公开(公告)日:2020-06-11

    申请号:US16528622

    申请日:2019-08-01

    IPC分类号: H01L29/786 H01L27/12

    摘要: An oxide thin film transistor, an array substrate, and preparation methods thereof are disclosed. The method for preparing an oxide thin film transistor comprises a step of forming a pattern comprising an oxide semiconductor active layer on a substrate, wherein the step comprises: forming an amorphous oxide semiconductor thin film on the substrate; performing an excimer laser annealing, at least at a position in the amorphous oxide semiconductor thin film corresponding to a channel region of oxide semiconductor active layer to be formed, such that the amorphous oxide semiconductor material at the laser-annealed position is crystallized, to form a crystalline oxide semiconductor material; and forming the pattern comprising the oxide semiconductor active layer.

    Method for fabricating array substrate

    公开(公告)号:US10242886B2

    公开(公告)日:2019-03-26

    申请号:US15569728

    申请日:2017-04-12

    发明人: Ce Ning Wei Yang

    摘要: A method for fabricating an array substrate is disclosed. The method comprises: forming a first oxide semiconductor active layer of a first TFT in a GOA area of a substrate; performing a first annealing process on the first oxide semiconductor active layer at a first temperature; forming a first insulating layer which covers the first oxide semiconductor active layer; performing a second annealing process on the first oxide semiconductor active layer at a second temperature, wherein the second temperature is lower than the first temperature. This improves a forward bias stability of the first TFT and increases the device lifetime.