Invention Grant
- Patent Title: Method for interrupting a line in an interconnect
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Application No.: US15615299Application Date: 2017-06-06
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Publication No.: US10242907B2Publication Date: 2019-03-26
- Inventor: Julien Ryckaert , Juergen Boemmels , Christopher Wilson
- Applicant: IMEC VZW
- Applicant Address: BE Leuven
- Assignee: IMEC vzw
- Current Assignee: IMEC vzw
- Current Assignee Address: BE Leuven
- Agency: Knobbe Martens Olson & Bear LLP
- Priority: EP16173359 20160607
- Main IPC: H01L21/4763
- IPC: H01L21/4763 ; H01L21/768 ; H01L21/033 ; H01L21/311 ; H01L23/528

Abstract:
A method for forming a pattern for an integrated circuit is disclosed. In one aspect, the method includes (a) providing a hardmask layer; (b) overlaying the hard mask layer with a set of parallel material lines delimiting gaps therebetween; and (c) providing a spacer layer following the shape of the material layer. The method further includes (d) removing a top portion of the spacer layer, thereby forming spacer lines alternatively separated by material lines and by gaps; and (e) providing a blocking element in a portion of a gap. The method also includes (f) etching selectively the hard mask layer by using the material layer, the spacer lines and the blocking element as a mask, thereby providing a first set of parallel trenches in the hardmask layer, wherein a trench has a blocked portion; and (g) selectively removing the blocking element.
Public/Granted literature
- US20170352587A1 METHOD FOR INTERRUPTING A LINE IN AN INTERCONNECT Public/Granted day:2017-12-07
Information query
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