- 专利标题： Method for removing a metal deposit placed on a surface in a chamber
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申请号： US15328413申请日： 2015-07-24
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公开(公告)号： US10246781B2公开(公告)日： 2019-04-02
- 发明人: Julien Vitiello , Jean-Luc Delcarri , Fabien Piallat
- 申请人： KOBUS
- 代理机构： Burr & Forman LLP
- 代理商 Harvey S. Kauget
- 优先权： FR1457137 20140724
- 国际申请： PCT/EP2015/067044 WO 20150724
- 国际公布： WO2016/012610 WO 20160128
- 主分类号： C23F1/00
- IPC分类号： C23F1/00 ; C07C49/167 ; C07C45/00 ; C23C14/56 ; C23C16/44 ; C23G5/00 ; H01J37/32
摘要：
A method for removing a metallic deposit disposed on a surface in a chamber, including the following steps: a) a step of oxidizing the metallic deposit; b) a step of injecting chemical species adapted to volatilized the oxidized metallic deposit, the step b) being implemented during at least a part of step a); and in step b), the chemical species are injected according to a sequence of pulses.
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