- 专利标题: Ion implanter and ion implantation method
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申请号: US15937346申请日: 2018-03-27
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公开(公告)号: US10249477B2公开(公告)日: 2019-04-02
- 发明人: Syuta Ochi , Shiro Ninomiya , Yuuji Takahashi , Tadanobu Kagawa
- 申请人: SUMITOMO HEAVY INDUSTRIES ION TECHNOLOGY CO., LTD.
- 申请人地址: JP Tokyo
- 专利权人: SUMITOMO HEAVY INDUSTRIES ION TECHNOLOGY CO., LTD.
- 当前专利权人: SUMITOMO HEAVY INDUSTRIES ION TECHNOLOGY CO., LTD.
- 当前专利权人地址: JP Tokyo
- 代理机构: Michael Best & Friedrich LLP
- 优先权: JP2017-064492 20170329
- 主分类号: H01J37/32
- IPC分类号: H01J37/32 ; H01L21/223 ; H01J37/317
摘要:
An ion implanter includes a plasma shower device configured to supply electrons to an ion beam with which a wafer is irradiated. The plasma shower device includes a plasma generating chamber provided with an extraction opening, a first electrode which is provided with an opening communicating with the extraction opening and to which a first voltage is applied with respect to an electric potential of the plasma generating chamber, a second electrode which is disposed at a position facing the first electrode such that the ion beam is interposed between the first and second electrodes and to which a second voltage is applied with respect to the electric potential of the plasma generating chamber, and a controller configured to independently control the first voltage and the second voltage to switch operation modes of the plasma shower device.
公开/授权文献
- US20180286637A1 ION IMPLANTER AND ION IMPLANTATION METHOD 公开/授权日:2018-10-04
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