- 专利标题: Electronic circuit for compensating a sensitivity drift of a hall effect element due to stress
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申请号: US16132653申请日: 2018-09-17
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公开(公告)号: US10254354B2公开(公告)日: 2019-04-09
- 发明人: Juan Manuel Cesaretti
- 申请人: Allegro MicroSystems, LLC
- 申请人地址: US NH Manchester
- 专利权人: Allegro MicroSystems, LLC
- 当前专利权人: Allegro MicroSystems, LLC
- 当前专利权人地址: US NH Manchester
- 代理机构: Daly, Crowley, Mofford & Durkee, LLP
- 主分类号: H01L27/22
- IPC分类号: H01L27/22 ; G01R33/00 ; G01R33/07 ; H01L49/02 ; H01L43/04 ; H01L43/06 ; G01L1/22 ; G01R27/08 ; H01L21/02 ; G01R33/09
摘要:
The present disclosure is directed to an electronic circuit having a Hall effect element and a resistor bridge, all disposed over a common semiconductor substrate. The resistor bridge includes a first set of resistive elements having a first vertical epitaxial resistor and a first lateral epitaxial resistor coupled in series, and a second set of resistive elements having a second vertical epitaxial resistor and a second lateral epitaxial resistor coupled in series. The first set of resistive elements and the second set of resistive elements can be coupled in parallel. The resistor bridge can be configured to sense a stress value of the Hall effect element.
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