Invention Grant
- Patent Title: Vertical transistor gated diode
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Application No.: US15956477Application Date: 2018-04-18
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Publication No.: US10256317B2Publication Date: 2019-04-09
- Inventor: Karthik Balakrishnan , Alexander Reznicek
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Agent Daniel P. Morris, Esq.
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L29/739 ; H01L29/08 ; H01L21/02 ; H01L29/423 ; H01L29/49 ; H01L29/51 ; H01L29/06 ; H01L29/73 ; H01L29/165

Abstract:
After forming a trench extending through a sacrificial gate layer to expose a surface of a doped bottom semiconductor layer, a diode including a first doped semiconductor segment and a second doped semiconductor segment having a different conductivity type than the first doped semiconductor segment is formed within the trench. The sacrificial gate layer that laterally surrounds the first doped semiconductor segment and the second doped semiconductor segment is subsequently replaced with a gate structure to form a gated diode.
Public/Granted literature
- US20180366557A1 VERTICAL TRANSISTOR GATED DIODE Public/Granted day:2018-12-20
Information query
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