Invention Grant
- Patent Title: Anchor tracking for MEMS accelerometers
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Application No.: US15890835Application Date: 2018-02-07
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Publication No.: US10261105B2Publication Date: 2019-04-16
- Inventor: William A. Clark
- Applicant: Analog Devices, Inc.
- Applicant Address: US MA Norwood
- Assignee: Analog Devices, Inc.
- Current Assignee: Analog Devices, Inc.
- Current Assignee Address: US MA Norwood
- Agency: Wolf, Greenfield & Sacks, P.C.
- Main IPC: G01P15/125
- IPC: G01P15/125 ; G01P15/18 ; G01P15/08

Abstract:
A microelectromechanical system (MEMS) accelerometer is described. The MEMS accelerometer is arranged to limit distortions in the detection signal caused by displacement of the anchor(s) connecting the MEMS accelerometer to the underlying substrate. The MEMS accelerometer may include masses arranged to move in opposite directions in response to an acceleration of the MEMS accelerometer, and to move in the same direction in response to displacement of the anchor(s). The masses may, for example, be hingedly coupled to a beam in a teeter-totter configuration. Motion of the masses in response to acceleration and anchor displacement may be detected using capacitive sensors.
Public/Granted literature
- US20180231580A1 ANCHOR TRACKING FOR MEMS ACCELEROMETERS Public/Granted day:2018-08-16
Information query
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