Invention Grant
- Patent Title: Semiconductor device having through-silicon-via and methods of forming the same
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Application No.: US15910136Application Date: 2018-03-02
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Publication No.: US10262922B2Publication Date: 2019-04-16
- Inventor: Jaspreet S. Gandhi , Wayne H. Huang
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Brooks, Cameron & Huebsch, PLLC
- Main IPC: H01L23/46
- IPC: H01L23/46 ; H01L23/52 ; H01L29/40 ; H01L21/4763 ; H01L21/44 ; H01L23/48 ; H01L21/768 ; H01L23/00 ; H01L21/683

Abstract:
Semiconductor devices having a through-silicon-via and methods of forming the same are described herein. As an example, a semiconductor device may include a substrate material, a through-silicon-via protrusion extending from the substrate material, a first dielectric material formed on the substrate material, a second dielectric material formed on the first dielectric material, and an interconnect formed on the through-silicon-via protrusion, where the interconnect formed is in an opening in the second dielectric material.
Public/Granted literature
- US20180190571A1 SEMICONDUCTOR DEVICE HAVING THROUGH-SILICON-VIA AND METHODS OF FORMING THE SAME Public/Granted day:2018-07-05
Information query
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