Invention Grant
- Patent Title: Apparatus for coupling a hot wire source to a process chamber
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Application No.: US14771494Application Date: 2014-03-07
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Publication No.: US10269593B2Publication Date: 2019-04-23
- Inventor: Joe Griffith Cruz , Hanh Nguyen , Randy Vrana , Karl Armstrong
- Applicant: APPLIED MATERIALS, INC.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Moser Taboada
- Agent Alan Taboada
- International Application: PCT/US2014/021645 WO 20140307
- International Announcement: WO2014/149962 WO 20140925
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01L21/687 ; C23C16/27
Abstract:
Apparatus for coupling a hot wire source to a process chamber is provided herein. In some embodiments, an apparatus for coupling a hot wire source to a process chamber may include: a housing having an open end and a through hole formed through a top and a bottom of the housing; and a filament assembly configured to be disposed within the housing, the filament assembly having a frame and a plurality of filaments disposed across the frame, wherein the plurality of filaments of the filament assembly are substantially parallel with the top and the bottom of the housing and at least a portion of the plurality of filaments are disposed within the through hole of the housing when the filament assembly is disposed within the housing.
Public/Granted literature
- US20160005631A1 APPARATUS FOR COUPLING A HOT WIRE SOURCE TO A PROCESS CHAMBER Public/Granted day:2016-01-07
Information query
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