Invention Grant
- Patent Title: Mid-plane word line switch connection for CMOS under three-dimensional memory device and method of making thereof
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Application No.: US15882521Application Date: 2018-01-29
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Publication No.: US10269817B2Publication Date: 2019-04-23
- Inventor: Hiroyuki Ogawa , James Kai
- Applicant: SANDISK TECHNOLOGIES LLC
- Applicant Address: US TX Addison
- Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee Address: US TX Addison
- Agency: The Marbury Law Group PLLC
- Main IPC: H01L27/1157
- IPC: H01L27/1157 ; H01L27/11524 ; H01L27/11529 ; H01L27/11548 ; H01L27/11556 ; H01L27/11573 ; H01L27/11575 ; H01L27/11582

Abstract:
A three-dimensional memory array device can include mid-plane terrace regions between a pair of memory array regions. The electrically conductive layers of the three-dimensional memory array device continuously extend between the pair of memory array regions through a connection region, which is provided adjacent to the mid-plane terrace regions. Contact via structures contacting the electrically conductive layers can be provided in the mid-plane terrace regions, and through-memory-level via structures that extend through the alternating stack and connected to underlying lower metal interconnect structures and semiconductor devices can be provided through the mid-plane terrace region and/or through the connection region. Upper metal interconnect structures can connect the contact via structures and the through-memory-level via structures.
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