- 专利标题: Preclean and deposition methodology for superconductor interconnects
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申请号: US15597565申请日: 2017-05-17
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公开(公告)号: US10276504B2公开(公告)日: 2019-04-30
- 发明人: Vivien Luu , Christopher F. Kirby , Brian Wagner , Michael Rennie
- 申请人: Vivien Luu , Christopher F. Kirby , Brian Wagner , Michael Rennie
- 申请人地址: US VA Falls Church
- 专利权人: NORTHROP GRUMMAN SYSTEMS CORPORATION
- 当前专利权人: NORTHROP GRUMMAN SYSTEMS CORPORATION
- 当前专利权人地址: US VA Falls Church
- 代理机构: Tarolli, Sundheim, Covell & Tummino LLP
- 主分类号: H01L23/532
- IPC分类号: H01L23/532 ; H01L21/00 ; H01L23/522 ; H01L21/768 ; H01L21/02 ; H01L39/24
摘要:
A method is provided of forming a superconductor interconnect structure. The method comprises forming a dielectric layer overlying a substrate, forming an interconnect opening in the dielectric layer, and moving the substrate to a deposition chamber. The method further comprises performing a cleaning process on the top surface of the dielectric layer and in the interconnect opening while in the deposition chamber, and depositing a superconducting metal in the interconnect opening while in the deposition chamber to form a superconducting element in the superconductor interconnect structure.