Invention Grant
- Patent Title: Shielded probe systems with controlled testing environments
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Application No.: US15725650Application Date: 2017-10-05
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Publication No.: US10281492B2Publication Date: 2019-05-07
- Inventor: Michael Teich , Karsten Stoll , Walter Matthias Clauss , Swen Schmiedchen
- Applicant: Cascade Microtech, Inc.
- Applicant Address: US OR Beaverton
- Assignee: FormFactor Beaverton, Inc.
- Current Assignee: FormFactor Beaverton, Inc.
- Current Assignee Address: US OR Beaverton
- Agency: Dascenzo Intellectual Property Law, P.C.
- Main IPC: G01R31/10
- IPC: G01R31/10 ; G01R1/18 ; G01R1/067 ; G01R1/44 ; G01R1/073 ; G01N27/42 ; G01N31/02

Abstract:
Shielded probe systems are disclosed herein. The shielded probe systems are configured to test a device under test (DUT) and include an enclosure that defines an enclosure volume, a translation stage with a stage surface, a substrate-supporting assembly extending from the stage surface, an electrically conductive shielding structure, an isolation structure, and a thermal shielding structure. The substrate-supporting assembly includes an electrically conductive support surface, which is configured to support a substrate that includes the DUT. The electrically conductive shielding structure defines a shielded volume. The isolation structure electrically isolates the electrically conductive shielding structure from the enclosure and from the translation stage. The thermal shielding structure extends within the enclosure volume and at least partially between the enclosure and the substrate-supporting assembly.
Public/Granted literature
- US20180031608A1 SHIELDED PROBE SYSTEMS WITH CONTROLLED TESTING ENVIRONMENTS Public/Granted day:2018-02-01
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