公开(公告)号：US10180486B2

公开(公告)日：2019-01-15

申请号：US15072204

申请日：2016-03-16

Applicant: Cascade Microtech, Inc.

Inventor： Daniel M. Bock ,  Samantha Nhim ,  Lynh Thuy Bui

IPC: G01R35/00 ,  G01R1/067 ,  G01R31/28 ,  G01R31/319 ,  H01L21/66

Abstract: Test standards and methods for impedance calibration of a probe system and probe systems that include the test standards and/or utilize the methods are disclosed herein. The test standards include at least one test structure. In some embodiments, the test standard further includes an alignment structure that is associated with the test structure. In some embodiments, the test standards include a plurality of test structures. In some embodiments, the plurality of test structures includes a thin film thru test structure and a thin film offset test structure. In some embodiments, the plurality of test structures is positioned to simultaneously contact a plurality of probe regions of a probe head. The methods include methods of calibrating a probe system.

公开(公告)号：US10161994B2

公开(公告)日：2018-12-25

申请号：US15181909

申请日：2016-06-14

Applicant: Cascade Microtech, Inc.

Inventor： Timothy Allen McMullen ,  Brent Dale Harry ,  Eric James Wilcox ,  James J. Donlin

IPC: G01R31/28

Abstract: Systems and methods for electrically testing electromigration in an electromigration test structure are disclosed herein. The systems include a voltage control portion, a current control portion, and a current regulating structure. The systems further include an electric current detector, a first system connection, and a second system connection. The systems also include a voltage detector, and a controller. In some embodiments of the methods, a voltage control portion regulates a high-side signal electric current to maintain a voltage difference below a voltage setpoint while a current control portion maintains the high-side signal electric current below a threshold current value. In some embodiments of the methods, one of the voltage difference and a magnitude of the high-side signal electric current is selected as a primary control parameter while the other is selected as a compliant control parameter.

公开(公告)号：US20180341399A1

公开(公告)日：2018-11-29

申请号：US15986517

申请日：2018-05-22

Applicant: Cascade Microtech, Inc.

Inventor： Jens Fiedler ,  Ralf Keller ,  Jeremy Houston Smith

IPC: G06F3/0488 ,  H04L12/26 ,  H04L12/24

Abstract: Probe stations, probe systems including probe stations, and methods for controlling the operation of probe stations. In one embodiment, the methods utilize information regarding contact between two of a user's fingers and a touch screen display to change a location of a structure on the touch screen display. In another embodiment, the methods utilize information regarding contact between three of the user's fingers and the touch screen display to transition among different views of the probe stations. In another embodiment, the methods utilize information regarding contact between two fingers on one of the user's hands and the touch screen display and information regarding contact between two fingers on the other of the user's hands and the touch screen display to rotate the image of the probe station. The probe stations include a controller programmed to perform the methods. The probe systems include the probe stations, a server, and mobile device.

公开(公告)号：US10060950B2

公开(公告)日：2018-08-28

申请号：US14997345

申请日：2016-01-15

Applicant: Cascade Microtech, Inc.

Inventor： Michael E Simmons ,  Bryan Conrad Bolt ,  Christopher Anthony Storm ,  Kazuki Negishi ,  Joseph George Frankel ,  Robbie Ingram-Goble

IPC: G01R31/00 ,  G01R1/18 ,  G01R1/067 ,  G01R31/28

CPC classification number: G01R1/18 ,  G01R1/06705 ,  G01R31/2849

Abstract: Shielded probe systems are disclosed herein. The probe systems are configured to test a device under test (DUT) and include a measurement chamber that at least partially bounds an enclosed volume, an aperture defined by the measurement chamber, a probing assembly, and a shielding structure. The probing assembly includes a probe, which is oriented within the enclosed volume, a probe arm, which is operatively attached to the probe, and a manipulator, which is operatively attached to the probe arm. At least a portion of the probing assembly extends through the aperture. The shielding structure extends between the measurement chamber and the probing assembly and is configured to restrict fluid flow through the aperture and shield the enclosed volume from an ambient environment that surrounds the measurement chamber while maintaining at least a threshold separation distance from the probe arm throughout a probe arm range-of-motion thereof.

公开(公告)号：US20170338142A1

公开(公告)日：2017-11-23

申请号：US15670364

申请日：2017-08-07

Applicant: Cascade Microtech, Inc.

Inventor： Michael E. Simmons ,  Kazuki Negishi ,  Ryan Garrison ,  Philip Wolf

IPC: H01L21/683 ,  G01R31/28

CPC classification number: H01L21/6838 ,  G01R31/2601 ,  G01R31/2865 ,  G01R31/2874 ,  Y10T279/11 ,  Y10T279/34

Abstract: A chuck for testing an integrated circuit includes an upper conductive layer having a lower surface and an upper surface suitable to support a device under test. An upper insulating layer has an upper surface at least in partial face-to-face contact with the lower surface of the upper conductive layer, and a lower surface. A middle conductive layer has an upper surface at least in partial face-to-face contact with the lower surface of the upper insulating layer, and a lower surface.

公开(公告)号：US20170285083A1

公开(公告)日：2017-10-05

申请号：US15471199

申请日：2017-03-28

Applicant: Cascade Microtech, Inc.

Inventor： Timothy Allen McMullen ,  Jeffery Allan Shepler ,  Clint Vander Giessen

IPC: G01R31/00

CPC classification number: G01R31/003 ,  G01R31/2863 ,  G01R31/2874

Abstract: Probe systems, storage media, and methods for wafer-level testing over extended temperature ranges are disclosed herein. The methods are configured to test a plurality of devices under test (DUTs) present on a substrate. The probe systems are programmed to perform the methods. The storage media include computer-readable instructions that direct a probe system to perform the methods.

公开(公告)号：US20170269183A1

公开(公告)日：2017-09-21

申请号：US15072204

申请日：2016-03-16

Applicant: Cascade Microtech, Inc.

Inventor： Daniel M. Bock ,  Samantha Nhim ,  Lynh Thuy Bui

IPC: G01R35/00 ,  G01R1/067

CPC classification number: G01R35/005 ,  G01R1/067 ,  G01R31/2886 ,  G01R31/3191 ,  G01R35/007 ,  H01L22/34

Abstract: Test standards and methods for impedance calibration of a probe system and probe systems that include the test standards and/or utilize the methods are disclosed herein. The test standards include at least one test structure. In some embodiments, the test standard further includes an alignment structure that is associated with the test structure. In some embodiments, the test standards include a plurality of test structures. In some embodiments, the plurality of test structures includes a thin film thru test structure and a thin film offset test structure. In some embodiments, the plurality of test structures is positioned to simultaneously contact a plurality of probe regions of a probe head. The methods include methods of calibrating a probe system.

公开(公告)号：US20170212166A1

公开(公告)日：2017-07-27

申请号：US15007459

申请日：2016-01-27

Applicant: Cascade Microtech, Inc.

Inventor： Brandon Liew

IPC: G01R31/28 ,  G01R1/073

CPC classification number: G01R31/2891

Abstract: Probe head assemblies with constrained internal motion and probe systems including the probe head assemblies are disclosed herein. The probe head assemblies include a contacting structure, an orientation-regulating structure, and a support frame. The contacting structure includes a plurality of conductive probes configured to physically and electrically contact corresponding contact pads on the DUT. The support frame is configured to support the contacting structure and the orientation-regulating structure. The orientation-regulating structure supports the contacting structure and is configured to permit translational motion of the contacting structure relative to the support frame along a contacting axis. The orientation-regulating structure further is configured to resist translational motion of the contacting structure relative to the support frame in any direction that is at least substantially perpendicular to the contacting axis. The orientation-regulating structure may include a compound linear flexure.

公开(公告)号：US20170205446A1

公开(公告)日：2017-07-20

申请号：US14997345

申请日：2016-01-15

Applicant: Cascade Microtech, Inc.

Inventor： Michael E. Simmons ,  Bryan Conrad Bolt ,  Christopher Anthony Storm ,  Kazuki Negishi ,  Joseph George Frankel ,  Robbie Ingram-Goble

IPC: G01R1/18 ,  G01R1/067

CPC classification number: G01R1/18 ,  G01R1/06705 ,  G01R31/2849

Abstract: Shielded probe systems are disclosed herein. The probe systems are configured to test a device under test (DUT) and include a measurement chamber that at least partially bounds an enclosed volume, an aperture defined by the measurement chamber, a probing assembly, and a shielding structure. The probing assembly includes a probe, which is oriented within the enclosed volume, a probe arm, which is operatively attached to the probe, and a manipulator, which is operatively attached to the probe arm. At least a portion of the probing assembly extends through the aperture. The shielding structure extends between the measurement chamber and the probing assembly and is configured to restrict fluid flow through the aperture and shield the enclosed volume from an ambient environment that surrounds the measurement chamber while maintaining at least a threshold separation distance from the probe arm throughout a probe arm range-of-motion thereof.

公开(公告)号：US20170146594A1

公开(公告)日：2017-05-25

申请号：US15339419

申请日：2016-10-31

Applicant: Cascade Microtech, Inc.

Inventor： Peter Douglas Andrews ,  David Michael Newton ,  David Randle Hess

IPC: G01R31/28

CPC classification number: G01R31/2891 ,  G01R31/2874

Abstract: Probe systems and methods for automatically maintaining alignment between a probe and a device under test (DUT) during a temperature change. The methods include collecting an initial image of a planar offset fiducial and determining an initial height reference of a height offset fiducial. The methods further include changing a temperature of the DUT, automatically maintaining a planar alignment between a probe and the DUT during the changing, and automatically maintaining a height alignment between the probe and the BUT during the changing. The probe systems include a chuck, which defines a support surface configured to support a substrate that includes the DUT, and a probe head assembly, which includes a probe configured to contact a corresponding contact pad of the DUT. The probe systems further include a substrate thermal module, which is configured to regulate a temperature of the DUT, and a controller programmed to execute the methods.