Invention Grant
- Patent Title: Methods of forming conductive contact structures to semiconductor devices and the resulting structures
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Application No.: US15728632Application Date: 2017-10-10
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Publication No.: US10290544B2Publication Date: 2019-05-14
- Inventor: Ruilong Xie , Lars W. Liebmann , Daniel Chanemougame , Chanro Park
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Amerson Law Firm, PLLC
- Main IPC: H01L21/768
- IPC: H01L21/768 ; H01L21/8234 ; H01L23/522 ; H01L27/088 ; H01L29/06 ; H01L23/528

Abstract:
One illustrative method disclosed herein may include forming a contact etching structure in a layer of insulating material positioned above first and second lower conductive structures, wherein at least a portion of the contact etching structure is positioned laterally between the first and second lower conductive structures, forming a first conductive line and a first conductive contact adjacent a first side of the contact etching structure and forming a second conductive line and a second conductive contact adjacent a second side of the contact etching structure, wherein a spacing between the first and second conductive lines is approximately equal to a dimension of the contact etching structure.
Public/Granted literature
- US20190109045A1 METHODS OF FORMING CONDUCTIVE CONTACT STRUCTURES TO SEMICONDUCTOR DEVICES AND THE RESULTING STRUCTURES Public/Granted day:2019-04-11
Information query
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