Invention Grant
- Patent Title: Semiconductor device with oxide semiconductor film electrical characteristic change of which is inhibited
-
Application No.: US14721362Application Date: 2015-05-26
-
Publication No.: US10290656B2Publication Date: 2019-05-14
- Inventor: Junichi Koezuka , Masami Jintyou , Daisuke Kurosaki , Yukinori Shima , Toshimitsu Obonai
- Applicant: Semiconductor Energy Laboratory Co., Ltd.
- Applicant Address: JP
- Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee Address: JP
- Agency: Husch Blackwell LLP
- Priority: JP2014-112466 20140530
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L29/786 ; H01L27/12 ; H01L21/04 ; H01L21/26

Abstract:
Provided is a transistor which includes an oxide semiconductor film in a channel region. A change from a shift value before light irradiation to a shift value under light irradiation is greater than or equal to −1 V and less than or equal to 0.5 V, where the shift value is a gate voltage at a point of intersection of an axis of 1×10−12 A and a steepest tangent line of the logarithm of a drain current in drain current-gate voltage characteristics of the transistor, and where the light irradiation is performed on the oxide semiconductor film with light having an energy greater than or equal to a band gap of the oxide semiconductor film.
Public/Granted literature
- US20150348998A1 Semiconductor Device and Display Device Including the Same Public/Granted day:2015-12-03
Information query
IPC分类: