Invention Grant
- Patent Title: High voltage resistor device
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Application No.: US15694341Application Date: 2017-09-01
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Publication No.: US10297661B2Publication Date: 2019-05-21
- Inventor: Yi-Cheng Chiu , Wen-Chih Chiang , Chun Lin Tsai , Kuo-Ming Wu , Shiuan-Jeng Lin , Yi-Min Chen , Hung-Chou Lin , Karthick Murukesan
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L23/522 ; H01L23/528 ; H01L29/78 ; H01L29/10 ; H01L29/66

Abstract:
The present disclosure relates to a high voltage resistor device that is able to receive high voltages using a small footprint, and an associated method of fabrication. In some embodiments, the high voltage resistor device has a substrate including a first region with a first doping type, and a drift region arranged within the substrate over the first region and having a second doping type. A body region having the first doping type laterally contacts the drift region. A drain region having the second doping type is arranged within the drift region, and an isolation structure is over the substrate between the drain region and the body region. A resistor structure is over the isolation structure and has a high-voltage terminal coupled to the drain region and a low-voltage terminal coupled to a gate structure over the isolation structure.
Public/Granted literature
- US20190006460A1 HIGH VOLTAGE RESISTOR DEVICE Public/Granted day:2019-01-03
Information query
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