Invention Grant
- Patent Title: Interconnections for 3D memory
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Application No.: US16137309Application Date: 2018-09-20
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Publication No.: US10304498B2Publication Date: 2019-05-28
- Inventor: Toru Tanzawa
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Brooks, Cameron & Huebsch, PLLC
- Main IPC: G11C16/10
- IPC: G11C16/10 ; G11C5/06 ; G11C16/26 ; H01L27/11529 ; H01L27/11551 ; H01L27/11524 ; G11C7/22 ; G11C7/12 ; G11C5/02 ; G11C16/04 ; G11C16/08 ; G11C16/16

Abstract:
Apparatuses and methods for interconnections for 3D memory are provided. One example apparatus can include a stack of materials including a plurality of pairs of materials, each pair of materials including a conductive line formed over an insulation material. The stack of materials has a stair step structure formed at one edge extending in a first direction. Each stair step includes one of the pairs of materials. A first interconnection is coupled to the conductive line of a stair step, the first interconnection extending in a second direction substantially perpendicular to a first surface of the stair step.
Public/Granted literature
- US20190027194A1 INTERCONNECTIONS FOR 3D MEMORY Public/Granted day:2019-01-24
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