Invention Grant
- Patent Title: Mass spectrometer, use thereof, and method for the mass spectrometric examination of a gas mixture
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Application No.: US14967699Application Date: 2015-12-14
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Publication No.: US10304672B2Publication Date: 2019-05-28
- Inventor: Gennady Fedosenko , Michel Aliman , Hin Yiu Anthony Chung , Albrecht Ranck , Leonid Gorkhover
- Applicant: Carl Zeiss SMT GmbH , Carl Zeiss Microscopy GmbH
- Applicant Address: DE Oberkochen DE Jena
- Assignee: Carl Zeiss SMT GmbH,Carl Zeiss Microscopy GmbH
- Current Assignee: Carl Zeiss SMT GmbH,Carl Zeiss Microscopy GmbH
- Current Assignee Address: DE Oberkochen DE Jena
- Agency: Fish & Richardson P.C.
- Priority: DE102013213501 20130710
- Main IPC: H01J49/04
- IPC: H01J49/04 ; H01J49/14 ; H01J49/00 ; H01J49/10

Abstract:
The disclosure relates to a mass spectrometer for mass spectrometric examination of gas mixtures, including: an ionization device and an ion trap for storage and mass spectrometric examination of the gas mixture. In one aspect of the disclosure, the ionization device is embodied for supplying ions and/or metastable particles of an ionization gas and/or for supplying electrons to the ion trap for ionizing the gas mixture to be examined and the mass spectrometer is embodied to determine the number of ions and/or metastable particles of the ionization gas present in the ion trap and/or the number of ions of a residual gas present in the ion trap prior to examining the gas mixture. The disclosure also relates to the use of such a mass spectrometer and a method for mass spectrometric examination of a gas mixture.
Public/Granted literature
- US20160111269A1 MASS SPECTROMETER, USE THEREOF, AND METHOD FOR THE MASS SPECTROMETRIC EXAMINATION OF A GAS MIXTURE Public/Granted day:2016-04-21
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