- 专利标题: Front opening wafer container with weight ballast
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申请号: US14899423申请日: 2014-06-18
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公开(公告)号: US10304710B2公开(公告)日: 2019-05-28
- 发明人: Eric A. Kirkland , Barry Gregerson , Eric S. Olson , Christian Andersen , Jason Todd Steffens , Ryan Mushel , Karen Anderson
- 申请人: ENTEGRIS, INC.
- 申请人地址: US MA Billerica
- 专利权人: Entegris, Inc.
- 当前专利权人: Entegris, Inc.
- 当前专利权人地址: US MA Billerica
- 代理机构: Entegris, Inc.
- 国际申请: PCT/US2014/043014 WO 20140618
- 国际公布: WO2014/205121 WO 20141224
- 主分类号: H01L21/673
- IPC分类号: H01L21/673
摘要:
Apparatuses and methods providing a ballast system for adjusting the center of gravity of a standardized front opening wafer container. Various embodiments of the disclosure present ballast systems that are low profile, do not require modifications to the shell of the wafer container, and can be retrofit to existing wafer carriers. In some embodiments, these capabilities are accomplished by a ballast that mounts to a kinematic coupling plate of the wafer container. In one embodiment, the ballasting can also provide sufficient counter force to the lifting forces associated with purging of the wafer container, thereby preventing “lift off” of the wafer container during purging operations. The ballasts can be removed for shipping of the wafer container, thereby decreasing shipping costs.
公开/授权文献
- US20160141194A1 FRONT OPENING WAFER CONTAINER WITH WEIGHT BALLAST 公开/授权日:2016-05-19
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