Invention Grant
- Patent Title: Semiconductor device structure with resistive element
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Application No.: US15599687Application Date: 2017-05-19
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Publication No.: US10304772B2Publication Date: 2019-05-28
- Inventor: Wan-Te Chen , Chung-Hui Chen , Wei-Chih Chen , Chii-Ping Chen , Wen-Sheh Huang , Bi-Ling Lin , Sheng-Feng Liu
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee Address: TW Hsinchu
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Main IPC: H01L23/522
- IPC: H01L23/522 ; H01L27/06 ; H01L23/367 ; H01L29/423

Abstract:
A semiconductor device structure is provided. The semiconductor device structure includes a semiconductor substrate, a gate stack, and an interconnect structure over the gate stack and the semiconductor substrate. The semiconductor device structure also includes a resistive element over the interconnect structure, and the resistive element is directly above the gate stack. The semiconductor device structure further includes a thermal conductive element over the interconnect structure. A direct projection of the thermal conductive element on a main surface of the resistive element extends across a portion of a first imaginary line and a portion of a second imaginary line of the main surface. The first imaginary line is perpendicular to the second imaginary line. The first imaginary line and the second imaginary line intersect at a center of the main surface. The semiconductor device structure includes a dielectric layer separating the thermal conductive element from the resistive element.
Public/Granted literature
- US20180337125A1 SEMICONDUCTOR DEVICE STRUCTURE WITH RESISTIVE ELEMENT Public/Granted day:2018-11-22
Information query
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