Invention Grant
- Patent Title: Imaging device and manufacturing method thereof
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Application No.: US15698019Application Date: 2017-09-07
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Publication No.: US10304828B2Publication Date: 2019-05-28
- Inventor: Yoshihiro Sato , Ryota Sakaida , Satoshi Shibata , Taiji Noda
- Applicant: Panasonic Intellectual Property Management Co., Ltd.
- Applicant Address: JP Osaka
- Assignee: PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
- Current Assignee: PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
- Current Assignee Address: JP Osaka
- Agency: McDermott Will & Emery LLP
- Priority: JP2016-183389 20160920
- Main IPC: H01L27/092
- IPC: H01L27/092 ; H01L27/146

Abstract:
An imaging device includes: a semiconductor substrate; a first insulating layer covering a surface of the semiconductor substrate, the first insulating layer including first and second portions, a thickness of the first portion being greater than a thickness of the second portion; and an imaging cell. The imaging cell includes: a first transistor including a first gate insulating layer and an impurity region in the semiconductor substrate as one of a source and a drain; a second transistor including a gate electrode and a second gate insulating layer; and a photoelectric converter electrically connected to the gate electrode and the impurity region. The first portion covers a portion of the impurity region, the portion being exposed to the surface of the semiconductor substrate. The first gate insulating layer is a part of the first portion. The second gate insulating layer is a part of the second portion.
Public/Granted literature
- US20180083004A1 IMAGING DEVICE AND MANUFACTURING METHOD THEREOF Public/Granted day:2018-03-22
Information query
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