Invention Grant
- Patent Title: Backside metal grid and metal pad simplification
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Application No.: US15873743Application Date: 2018-01-17
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Publication No.: US10304891B2Publication Date: 2019-05-28
- Inventor: Qin Wang , Gang Chen , Duli Mao
- Applicant: OmniVision Technologies, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: OmniVision Technologies, Inc.
- Current Assignee: OmniVision Technologies, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Christensen O'Connor Johnson Kindness PLLC
- Main IPC: H01L27/146
- IPC: H01L27/146 ; H01L31/18

Abstract:
An image sensor includes a semiconductor material including a plurality of photodiodes disposed in the semiconductor material. The image sensor also includes a first insulating material disposed proximate to a frontside of the semiconductor material, and an interconnect disposed in the first insulating material proximate to the frontside of the semiconductor material. A metal pad extends from a backside of the semiconductor material through the first insulating material and contacts the interconnect. A metal grid is disposed proximate to the backside of the semiconductor material, and the semiconductor material is disposed between the metal grid and the first insulating material disposed proximate to the frontside.
Public/Granted literature
- US20180182803A1 BACKSIDE METAL GRID AND METAL PAD SIMPLIFICATION Public/Granted day:2018-06-28
Information query
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