Invention Grant
- Patent Title: Fully wafer-level-packaged MEMS microphone and method for manufacturing the same
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Application No.: US15311152Application Date: 2014-08-26
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Publication No.: US10306372B2Publication Date: 2019-05-28
- Inventor: Quanbo Zou , Zhe Wang
- Applicant: GOERTEK INC.
- Applicant Address: CN WeiFang, Shandong
- Assignee: GOERTEK INC.
- Current Assignee: GOERTEK INC.
- Current Assignee Address: CN WeiFang, Shandong
- Agency: Knobbe Martens Olson & Bear LLP
- International Application: PCT/CN2014/085222 WO 20140826
- International Announcement: WO2016/029365 WO 20160303
- Main IPC: H04R3/00
- IPC: H04R3/00 ; H04R17/02 ; H04R9/06 ; H04R19/00 ; B81B7/00 ; H04R19/04 ; H04R31/00 ; B81B3/00 ; B81C1/00

Abstract:
The present invention provides a method for manufacturing a fully wafer-level-packaged MEMS microphone and a microphone manufactured with the same, the method comprises: separately manufacturing a first packaging wafer, an MEMS microphone wafer and a second packaging wafer; performing wafer-to-wafer bonding for the three wafers to form a plurality of fully wafer-level-packaged MEMS microphone units; singulating the fully wafer-level-packaged MEMS microphone units to form a plurality of fully wafer-level-packaged MEMS microphones, which are fully packaged at wafer level and do not need any further process after die singulation. The method can improve cost-effectiveness, performance consistency, manufacturability, quality, scaling capability of the packaged MEMS microphone.
Public/Granted literature
- US20170164117A1 FULLY WAFER-LEVEL-PACKAGED MEMS MICROPHONE AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2017-06-08
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