公开(公告)号：US11581291B2

公开(公告)日：2023-02-14

申请号：US16643307

申请日：2017-07-24

Applicant: GOERTEK INC.

Inventor： Peixuan Chen ,  Quanbo Zou ,  Xiangxu Feng ,  Tao Gan ,  Xiaoyang Zhang

IPC: H01L25/075 ,  H01L33/00 ,  G09F9/33 ,  H01L21/683 ,  H01L21/78 ,  H01L33/48

Abstract: A micro-LED display device and a manufacturing method thereof are disclosed. The method comprises: forming micro-LEDs (202) on a carrier substrate (201), wherein the carrier substrate (201) is transparent for a laser which is used in laser lifting-off; filling trenches between the micro-LEDs (202) on the carrier substrate (201) with a holding material (209); performing a laser lifting-off on selected ones of the micro-LEDs (202) to lift off them from the carrier substrate (201), wherein the selected micro-LEDs (202) are held on the carrier substrate (201) through the holding material (209); bonding the selected micro-LEDs (202) onto a receiving substrate (207) of the micro-LED display device; separating the selected micro-LEDs (202) from the carrier substrate (201) to transfer them to the receiving substrate (207).

公开(公告)号：US11297441B2

公开(公告)日：2022-04-05

申请号：US16640015

申请日：2018-09-06

Applicant: Goertek, Inc. ,  Qingdao Research Institute of Beihang University

Inventor： Quanbo Zou ,  Qunwen Leng ,  Zhe Wang

IPC: H04R19/04 ,  H04R19/00 ,  H01L43/08

Abstract: The present disclosure discloses a microphone, comprising: a first substrate, the first substrate having an inner cavity open at one end, wherein the microphone further comprises a vibration diaphragm and at least one cantilever which are provided to the first substrate and suspended above the inner cavity. The cantilever is separated from the vibration diaphragm by a spacing portion, and the vibration diaphragm and the inner cavity of the first substrate define an acoustically sealed cavity; and a detection structure is provided to the vibration diaphragm and the cantilever. The structural design of the cantilever is adopted, so that the space between the vibration diaphragm and the cantilever is open, the airflow can smoothly pass by the cantilever, and further the signal-to-noise ratio of the microphone can be greatly improved.

公开(公告)号：US11109162B2

公开(公告)日：2021-08-31

申请号：US16609194

申请日：2017-05-05

Applicant: GOERTEK INC.

Inventor： Quanbo Zou ,  Zhe Wang ,  Jialiang Yan

IPC: H04R19/04 ,  B81B7/00 ,  H04R1/04 ,  H04R19/00

Abstract: A MEMS microphone, comprising a packaging structure that is enveloped by a PCB substrate (1) and a housing (2), wherein the packaging structure is provided with a MEMS acoustoelectric chip (3) therein, and the PCB substrate (1) is provided with a sound port (11) at a position that is corresponding to the MEMS acoustoelectric chip (3), wherein, the MEMS microphone further comprises a filter (5), wherein the filter (5) is embedded into a back cavity of the MEMS acoustoelectric chip (3), the filter (5) and the PCB substrate (1) have a lateral hole therebetween, and the lateral hole serves as a sound channel that is used by the MEMS acoustoelectric chip (3) to gather sound. The MEMS microphone can prevent gas shock, block the interfering to the MEMS microphone by kinetic particles, keep the acoustic performance of the MEMS microphone, and reduce the packaging size of the MEMS microphone.

公开(公告)号：US11102586B2

公开(公告)日：2021-08-24

申请号：US16640022

申请日：2018-09-06

Applicant: Goertek, Inc. ,  Qingdao Research Institute of Beihang University

Inventor： Quanbo Zou ,  Qunwen Leng ,  Zhe Wang

IPC: H04R19/04

Abstract: An MEMS microphone is provided, comprising a first substrate and a vibration diaphragm supported above the first substrate by a spacing portion, the first substrate, the spacing portion, and the vibration diaphragm enclosing a vacuum chamber, and a static deflection distance of the vibration diaphragm under an atmospheric pressure being less than a distance between the vibration diaphragm and the first substrate, wherein: one of the vibration diaphragm and the first substrate is provided with a magnetic film, and the other one of the vibration diaphragm and the first substrate is provided with a magnetoresistive sensor cooperating with the magnetic film, the magnetoresistive sensor being configured to sense a change in a magnetic field of the magnetic film during a vibration of the vibration diaphragm and output a varying electrical signal.

公开(公告)号：US11099467B2

公开(公告)日：2021-08-24

申请号：US16483156

申请日：2017-02-06

Applicant: GOERTEK INC.

Inventor： Zhe Wang ,  Quanbo Zou ,  Qinglin Song ,  Jialiang Yan ,  Yujing Lin ,  Xiaoyang Zhang

IPC: G03B21/20 ,  G02B26/08 ,  G02B26/10

Abstract: A micro laser diode projector comprises: an MEMS scanning device, which rotates around a first axis and a second axis that are orthogonal to each other; and a micro laser diode light source including at least one micro laser diode, wherein the micro laser diode light source is mounted on the MEMS scanning device and rotates around the first and second axes with the MEMS scanning device to project light to a projection screen. An electronics apparatus including the micro laser diode projector is also discussed.

公开(公告)号：US10854779B2

公开(公告)日：2020-12-01

申请号：US16347614

申请日：2016-11-07

Applicant: GOERTEK. INC

Inventor： Quanbo Zou

IPC: H01L33/00 ,  H01L33/62 ,  H01L21/66 ,  H01L21/67 ,  H01L23/00 ,  H01L25/075

Abstract: Disclosed a micro-LED transfer method and manufacturing method. The micro-LED transfer method comprises: bringing pickup units (305, 605, 705) of a transfer head in contact with micro-LEDs (303, 603, 703) on a carrier substrate (301, 601, 701), wherein the pickup units (305, 605, 705) are able to apply current to the micro-LEDs (303, 603, 703); applying current to the micro-LEDs (303, 603, 703) via the pickup units (305, 605, 705) to obtain I-V characteristics of the micro-LEDs (303, 603, 703); determining known-good-die micro-LEDs based on the I-V characteristics; and transferring the known-good-die micro-LEDs from the carrier substrate to a receiving substrate (307, 608, 708) by using the transfer head.

公开(公告)号：US10756069B2

公开(公告)日：2020-08-25

申请号：US16465770

申请日：2016-12-12

Applicant: Goertek, Inc.

Inventor： Quanbo Zou

IPC: H01L33/06 ,  H01L25/075 ,  H01L21/66 ,  H01L33/38 ,  H01L33/00 ,  H01L33/40

Abstract: A display device manufacturing method, display device and electronics apparatus are provided. The display device manufacturing method comprises: forming the vertical micro-LEDs on a growth substrate: forming a first electrode on top of each of the vertical micro-LEDs; forming a second electrode on side surface of each of the vertical micro-LEDs; and transferring the vertical micro-LEDs from the growth substrate to a display substrate of a display device. An embodiment of this invention can reduce the back-end fabrication process on a display substrate after transfer.

公开(公告)号：US20200236471A1

公开(公告)日：2020-07-23

申请号：US16640015

申请日：2018-09-06

Applicant: Goertek Inc. ,  Qingdao Research Institute of Beihang University

Inventor： Quanbo Zou ,  Qunwen Leng ,  Zhe Wang

IPC: H04R19/04 ,  H04R19/00

Abstract: The present disclosure discloses a microphone, comprising: a first substrate, the first substrate having an inner cavity open at one end, wherein the microphone further comprises a vibration diaphragm and at least one cantilever which are provided to the first substrate and suspended above the inner cavity. The cantilever is separated from the vibration diaphragm by a spacing portion, and the vibration diaphragm and the inner cavity of the first substrate define an acoustically sealed cavity; and a detection structure is provided to the vibration diaphragm and the cantilever. The structural design of the cantilever is adopted, so that the space between the vibration diaphragm and the cantilever is open, the airflow can smoothly pass by the cantilever, and further the signal-to-noise ratio of the microphone can be greatly improved.

公开(公告)号：US20180288526A1

公开(公告)日：2018-10-04

申请号：US15562410

申请日：2015-10-30

Applicant: GOERTEK, INC.

Inventor： Quanbo Zou

IPC: H04R3/04 ,  H04R19/04 ,  H04R19/00 ,  H04R29/00

CPC classification number: H04R3/04 ,  H04R1/227 ,  H04R3/005 ,  H04R19/005 ,  H04R19/04 ,  H04R29/005 ,  H04R2201/003

Abstract: The present invention discloses a band-pass acoustic filter and an acoustic sensing apparatus. The band-pass acoustic filter including at least two MEMS microphone chips and an ASIC chip, wherein the output signals of the MEMS microphone chips are processed in the ASIC chip after being coupled.

公开(公告)号：US09930453B2

公开(公告)日：2018-03-27

申请号：US15119116

申请日：2014-07-15

Applicant: GOERTEK INC.

Inventor： Quanbo Zou ,  Zhe Wang

IPC: H04R7/14 ,  H04R19/01 ,  B81C1/00 ,  B81B3/00 ,  H04R1/04 ,  H04R19/04

CPC classification number: H04R7/14 ,  B81B3/0021 ,  B81B2201/0257 ,  B81B2203/0127 ,  B81B2203/019 ,  B81C1/0023 ,  B81C2201/115 ,  H01L2224/48091 ,  H01L2224/73265 ,  H01L2924/15192 ,  H04R1/04 ,  H04R19/016 ,  H04R19/04 ,  H04R2201/003 ,  H04R2307/027 ,  H01L2924/00014

Abstract: The present invention provides a silicon microphone with a high-aspect-ratio corrugated diaphragm and a microphone package including the same. The microphone comprises the corrugated diaphragm on which at least one ring-shaped corrugation is formed in the vicinity of the edge of the diaphragm which is fixed to the substrate, the corrugated diaphragm is flexible, wherein the ratio of the depth of the corrugation to the thickness of the diaphragm is larger than 5:1, preferably 20:1, and the walls of the corrugation are inclined to the surface of the diaphragm at an angle in the range of 80° to 100°. The microphone with the high-aspect-ratio corrugated diaphragm can achieve a consistent and optimal sensitivity and greatly reduce impact applied thereto in a drop test so that the performances, the reproducibility, the reliability and the yield can be improved. The microphone package of the present invention further provides a simplified processing, an improved sensitivity and an improved SNR.