- Patent Title: Semiconductor memory device and method of manufacturing the same
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Application No.: US15920628Application Date: 2018-03-14
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Publication No.: US10312243B2Publication Date: 2019-06-04
- Inventor: Hyun-jung Lee , Dongsoo Woo , Jin-Seong Lee , Namho Jeon , Jaeho Hong
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si, Gyeonggi-Do
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si, Gyeonggi-Do
- Agency: F. Chau & Associates, LLC
- Priority: KR10-2017-0092879 20170721
- Main IPC: H01L29/43
- IPC: H01L29/43 ; H01L29/49 ; H01L27/108 ; H01L29/423 ; H01L21/8238 ; H01L29/51

Abstract:
A semiconductor memory device includes a separation member defining active regions of a substrate. Gate lines intersect the active regions and are each buried in a trench formed in the substrate. Each of the gate lines includes a lower electrode structure and an upper electrode structure on the lower electrode structure. The upper electrode structure includes a source layer substantially covering a sidewall of the trench and including a work-function adjustment element. A conductive layer is on the source layer. A work-function adjustment layer is disposed between the source layer and the conductive layer. The work-function adjustment layer includes a material different from that of the source layer and is doped with the work-function adjustment element.
Public/Granted literature
- US20190027480A1 SEMICONDUCTOR MEMORY DEVICE AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2019-01-24
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