Invention Grant
- Patent Title: Gas barrier laminate, member for electronic device, and electronic device
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Application No.: US14780817Application Date: 2014-03-28
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Publication No.: US10323317B2Publication Date: 2019-06-18
- Inventor: Yuuta Suzuki , Wataru Iwaya , Koichi Nagamoto , Takeshi Kondo
- Applicant: LINTEC CORPORATION
- Applicant Address: JP Tokyo
- Assignee: LINTEC CORPORATION
- Current Assignee: LINTEC CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Priority: JP2013-074081 20130329
- International Application: PCT/JP2014/059326 WO 20140328
- International Announcement: WO2014/157685 WO 20141002
- Main IPC: C23C14/06
- IPC: C23C14/06 ; H05K5/06 ; H05K5/00 ; B32B9/00 ; B32B7/00 ; B32B7/02 ; B32B7/10 ; B32B9/04 ; B32B19/00 ; B32B19/04 ; B32B27/00 ; B32B27/06 ; B32B27/14 ; B32B27/16 ; B32B27/18 ; B32B27/28 ; G02F1/1333

Abstract:
The present invention is a gas barrier laminate comprising a base and a gas barrier unit, the gas barrier unit comprising at least two inorganic layers, at least one of the at least two inorganic layers being a silicon oxynitride layer, the silicon oxynitride layer including a composition-gradient region that has a thickness of 25 nm or more, the composition-gradient region being a region in which a content ratio of oxygen decreases and a content ratio of nitrogen increases in a thickness direction toward the base, and a ratio of the thickness of the composition-gradient region to the thickness of the entire silicon oxynitride layer being 0.15 or more. The present invention also relates to: an electronic device member that includes the gas barrier laminate, and an electronic device that includes the electronic device member. The present invention provides: a gas barrier laminate that exhibits a very high gas barrier capability and very high bendability, an electronic device member that includes the gas barrier laminate, and an electronic device that includes the electronic device member.
Public/Granted literature
- US20160076133A1 GAS BARRIER LAMINATE, MEMBER FOR ELECTRONIC DEVICE, AND ELECTRONIC DEVICE Public/Granted day:2016-03-17
Information query
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