- 专利标题： Utilizing multiple layers to increase spatial frequency
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申请号： US15690540申请日： 2017-08-30
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公开(公告)号： US10325777B2公开(公告)日： 2019-06-18
- 发明人: Lawrence A. Clevenger , John H. Zhang , Carl Radens
- 申请人： International Business Machines Corporation
- 申请人地址： US NY Armonk
- 专利权人： International Business Machines Corporation
- 当前专利权人： International Business Machines Corporation
- 当前专利权人地址： US NY Armonk
- 代理商 Nathan M. Rau
- 主分类号： H01L21/302
- IPC分类号： H01L21/302 ; H01L21/308 ; H01L21/768 ; H01L21/311 ; H01L21/02
摘要：
A chemical material is deposited on a surface of a substrate. A mandrel composition is deposited on a surface of the chemical material. A mandrel hard mask pattern is deposited on a surface of the mandrel composition. The mandrel composition is etched. The mandrel hard mask pattern is removed. A plurality of spacer materials are deposited sequentially onto a surface of the chemical material and a surface of the mandrel composition. A portion of each of the plurality of spacer materials are removed sequentially. A remainder of the mandrel composition is removed. The substrate is etched. The chemical material and at least one of the spacer materials of the plurality of spacer materials are removed.
公开/授权文献
- US20190067023A1 UTILIZING MULTIPLE LAYERS TO INCREASE SPATIAL FREQUENCY 公开/授权日：2019-02-28
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