Invention Grant
- Patent Title: Multi-function x-ray metrology tool for production inspection/monitoring of thin films and multidimensional structures
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Application No.: US14521345Application Date: 2014-10-22
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Publication No.: US10330612B2Publication Date: 2019-06-25
- Inventor: Lin Zhang , Shuran Sheng , Andrew V. Le
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan, LLP
- Main IPC: G01N23/00
- IPC: G01N23/00 ; G01N23/201 ; G01T7/08 ; G01N23/207 ; G03F7/20 ; H01L21/66
Abstract:
An apparatus for integrating metrology and method for using the same are disclosed. The apparatus includes a multi-chamber system having a transfer chamber, a deposition chamber, an etch chamber and a metrology chamber, and a robot configured to transfer a substrate between the deposition chamber or etch chamber and the metrology chamber.
Public/Granted literature
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