Invention Grant
- Patent Title: Photosensitive, developer-soluble bottom anti-reflective coating material
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Application No.: US13867815Application Date: 2013-04-22
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Publication No.: US10331032B2Publication Date: 2019-06-25
- Inventor: Joyce Lowes , Jinhua Dai , Alice Guerrero
- Applicant: Brewer Science Inc.
- Applicant Address: US MO Rolla
- Assignee: Brewer Science, Inc.
- Current Assignee: Brewer Science, Inc.
- Current Assignee Address: US MO Rolla
- Agency: Hovey Williams LLP
- Main IPC: G03F7/09
- IPC: G03F7/09 ; G03F7/20 ; G03F7/32 ; G03F7/40 ; G03F7/095 ; H01L21/266

Abstract:
Photosensitive, developer-soluble bottom anti-reflective coatings are described. Compositions and methods of forming the same are also disclosed along with resulting microelectronic structures. The anti-reflective compositions comprise a multi-functional epoxy compound having multiple epoxy moieties pendant therefrom and one or more crosslinkable chromophores bonded thereto. The compounds are dispersed or dissolved in a solvent system with a vinyl ether crosslinker and can be used to create crosslinkable and de-crosslinkable coatings for microelectronics fabrication.
Public/Granted literature
- US20130280656A1 PHOTOSENSITIVE, DEVELOPER-SOLUBLE BOTTOM ANTI-REFLECTIVE COATING MATERIAL Public/Granted day:2013-10-24
Information query
IPC分类: