Invention Grant
- Patent Title: Three-dimensional semiconductor memory device including vertically stacked electrodes
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Application No.: US15805513Application Date: 2017-11-07
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Publication No.: US10332902B2Publication Date: 2019-06-25
- Inventor: Yunghwan Son , Jaesung Sim , Shinhwan Kang , Youngwoo Park , Jaeduk Lee
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si, Gyeonggi-Do
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si, Gyeonggi-Do
- Agency: F. Chau & Associates, LLC
- Priority: KR10-2014-0146296 20141027
- Main IPC: H01L27/11575
- IPC: H01L27/11575 ; H01L27/11582 ; H01L27/11573 ; H01L29/34 ; H01L27/11526 ; G11C5/02 ; G11C16/04 ; H01L27/11517 ; H01L27/11565 ; H01L27/1157 ; H01L27/11548 ; H01L27/11556 ; G11C16/30 ; H01L27/11551

Abstract:
A three-dimensional (3D) semiconductor memory device that includes a peripheral logic structure including peripheral logic circuits disposed on a semiconductor substrate and a first insulation layer overlapping the peripheral logic circuits, and a plurality of memory blocks spaced apart from each other on the peripheral logic structure. At least one of the memory blocks includes a well plate electrode, a semiconductor layer in contact with a first surface of the well plate electrode, a stack structure including a plurality of electrodes vertically stacked on the semiconductor layer, and a plurality of vertical structures penetrating the stack structure and connected to the semiconductor layer.
Public/Granted literature
- US20180076212A1 THREE-DIMENSIONAL SEMICONDUCTOR MEMORY DEVICE Public/Granted day:2018-03-15
Information query
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