Invention Grant
- Patent Title: Gate tie-down enablement with inner spacer
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Application No.: US15880059Application Date: 2018-01-25
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Publication No.: US10332977B2Publication Date: 2019-06-25
- Inventor: Su Chen Fan , Andre P. Labonte , Lars W. Liebmann , Sanjay C. Mehta
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION , GLOBALFOUNDRIES Inc.
- Applicant Address: US NY Armonk KY Grand Cayman
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION,GLOBALFOUNDRIES INC
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION,GLOBALFOUNDRIES INC
- Current Assignee Address: US NY Armonk KY Grand Cayman
- Agency: Tutunjian & Bitetto, P.C.
- Agent Vazken Alexanian
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L21/768 ; H01L21/027 ; H01L23/535 ; H01L27/11 ; H01L21/311 ; H01L23/522 ; H01L23/528

Abstract:
A method for forming a gate tie-down includes opening up a cap layer and recessing gate spacers on a gate structure to expose a gate conductor; forming inner spacers on the gate spacers; etching contact openings adjacent to sides of the gate structure down to a substrate below the gate structures; and forming trench contacts on sides of the gate structure. An interlevel dielectric (ILD) is deposited on the gate conductor and the trench contacts and over the gate structure. The ILD is opened up to expose the trench contact on one side of the gate structure and the gate conductor. A second conductive material provides a self-aligned contact down to the trench contact on the one side and to form a gate contact down to the gate conductor and a horizontal connection within the ILD over an active area between the gate conductor and the self-aligned contact.
Public/Granted literature
- US20180151433A1 GATE TIE-DOWN ENABLEMENT WITH INNER SPACER Public/Granted day:2018-05-31
Information query
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