Invention Grant
- Patent Title: Apparatus and method for coating inner wall of metal tube
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Application No.: US15240253Application Date: 2016-08-18
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Publication No.: US10337099B2Publication Date: 2019-07-02
- Inventor: Seung Hee Han , Se Hoon An , Geun Hyuk Lee , In Seol Song , Seong Woo Jang
- Applicant: Korea Institute of Science and Technology
- Applicant Address: KR Seoul
- Assignee: Korea Institute of Science and Technology
- Current Assignee: Korea Institute of Science and Technology
- Current Assignee Address: KR Seoul
- Agency: NSIP Law
- Priority: KR10-2015-0118130 20150821
- Main IPC: C23C14/34
- IPC: C23C14/34 ; C23C14/16 ; C23C14/35 ; H01J37/34 ; C23C14/04 ; H01J37/32

Abstract:
An apparatus and a method for coating an inner wall of a metal tube are provided. The apparatus for coating an inner wall of a metal tube includes mounting posts on which both end openings of a metal tube are mounted and configured to block the inside of the metal tube from the ambient air so that a pressure in the metal tube is adjustable by the vacuum exhaust and inflow of process gases, a sputtering target metal tube installed inside the metal tube coaxially with the metal tube, a pulse electromagnet installed around an outside perimeter of the metal tube coaxially with the metal tube to apply a pulse magnetic field in an axial direction of the metal tube, an electromagnetic pulse power supply unit configured to apply pulse power to the pulse electromagnet, and a sputtering pulse power supply unit configured to synchronize a negative high-voltage pulse with the pulse power applied to the pulse electromagnet and apply to the sputtering target metal tube.
Public/Granted literature
- US20170051393A1 APPARATUS AND METHOD FOR COATING INNER WALL OF METAL TUBE Public/Granted day:2017-02-23
Information query
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