公开(公告)号：US10337099B2

公开(公告)日：2019-07-02

申请号：US15240253

申请日：2016-08-18

Applicant: Korea Institute of Science and Technology

Inventor： Seung Hee Han ,  Se Hoon An ,  Geun Hyuk Lee ,  In Seol Song ,  Seong Woo Jang

IPC: C23C14/34 ,  C23C14/16 ,  C23C14/35 ,  H01J37/34 ,  C23C14/04 ,  H01J37/32

Abstract: An apparatus and a method for coating an inner wall of a metal tube are provided. The apparatus for coating an inner wall of a metal tube includes mounting posts on which both end openings of a metal tube are mounted and configured to block the inside of the metal tube from the ambient air so that a pressure in the metal tube is adjustable by the vacuum exhaust and inflow of process gases, a sputtering target metal tube installed inside the metal tube coaxially with the metal tube, a pulse electromagnet installed around an outside perimeter of the metal tube coaxially with the metal tube to apply a pulse magnetic field in an axial direction of the metal tube, an electromagnetic pulse power supply unit configured to apply pulse power to the pulse electromagnet, and a sputtering pulse power supply unit configured to synchronize a negative high-voltage pulse with the pulse power applied to the pulse electromagnet and apply to the sputtering target metal tube.