Invention Grant
- Patent Title: Substrate cleaning apparatus
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Application No.: US15058277Application Date: 2016-03-02
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Publication No.: US10340158B2Publication Date: 2019-07-02
- Inventor: Eun-Seok Lee , Chang-Gil Ryu , Geun-Young Song , Jae-Chang Lee , Yun-Seok Choi , Jin-Suk Hong
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si
- Agency: Sughrue Mion, PLLC
- Priority: KR10-2015-0063157 20150506
- Main IPC: H01L21/67
- IPC: H01L21/67 ; B08B3/10 ; B08B1/04 ; B08B3/02 ; B05B1/20 ; B05B13/04 ; B08B1/00

Abstract:
Provided is a substrate cleaning apparatus including: a cleaning bath configured to accommodate a substrate having a first surface and a second surface; a substrate support configured to support the substrate; first and second nozzle bars provided in the cleaning bath to be rotatable in a plane parallel with the substrate, each of the first and the second nozzle bars including a passage; a plurality of nozzles provided along a longitudinal direction of each of the first and the second nozzle bars and configured to spray the cleaning solution from the passage of each of the first and the second nozzle bars to the substrate; and first and second brushes, the first brush provided on a first side of the substrate and configured to clean the first surface and the second brush provided on a second side of the substrate and configured to clean the second surface of the substrate.
Public/Granted literature
- US20160329219A1 SUBSTRATE CLEANING APPARATUS Public/Granted day:2016-11-10
Information query
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