Invention Grant
- Patent Title: Laser crystallizing apparatus
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Application No.: US15084201Application Date: 2016-03-29
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Publication No.: US10347484B2Publication Date: 2019-07-09
- Inventor: Joo Woan Cho , Jeong Kyun Na , Seung Hwan Lee , Joon-Hwa Bae , Byoung Ho Cheong , Byoung Kwon Choo , Oleg Prudnikov
- Applicant: SAMSUNG DISPLAY CO., LTD.
- Applicant Address: KR Yongin-si, Gyeonggi-Do
- Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee Address: KR Yongin-si, Gyeonggi-Do
- Agency: F. Chau & Associates, LLC
- Priority: KR10-2015-0119665 20150825
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01L21/02 ; G02B27/28

Abstract:
A laser crystallizing apparatus includes a laser generator that generates an incident laser beam that includes a P polarization component and an S polarization component, an optical system that converts the incident laser beam to generate an emitted laser beam, and a stage on which is mounted a target substrate with a target thin film which is laser-crystallized by being irradiated by the emitted laser beam. The optical system includes at least one half wave plate (HWP) that shifts a polarization axis direction of the incident laser beam received from the laser generator, at least one mirror that fully reflects the laser beam, and at least one polarization beam splitter (PBS) which reflects a part of the laser beam and transmits the other part of the laser beam.
Public/Granted literature
- US20170062248A1 LASER CRYSTALLIZING APPARATUS Public/Granted day:2017-03-02
Information query
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