Invention Grant
- Patent Title: Method for fabricating static random access memory having insulating layer with different thicknesses
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Application No.: US16207171Application Date: 2018-12-02
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Publication No.: US10347645B2Publication Date: 2019-07-09
- Inventor: Wanxun He , Su Xing
- Applicant: UNITED MICROELECTRONICS CORP.
- Applicant Address: TW Hsin-Chu
- Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee Address: TW Hsin-Chu
- Agent Winston Hsu
- Priority: TW106109135A 20170320
- Main IPC: H01L27/11
- IPC: H01L27/11 ; H01L27/12 ; H01L23/535 ; H01L29/66 ; H01L21/8238 ; H01L27/092 ; H01L29/78 ; H01L21/8234

Abstract:
A method for fabricating semiconductor device includes the steps of: providing a substrate having a first region and a second region and the substrate comprises a semiconductor layer on top of an insulating layer; forming a first front gate on the first region of the substrate and a second front gate on the second region of the substrate; removing part of the insulating layer under the first front gate; forming a first back gate on the insulating layer under the first front gate; and forming a second back gate under the second front gate.
Public/Granted literature
- US20190103408A1 METHOD FOR FABRICATING SEMICONDUCTOR DEVICE Public/Granted day:2019-04-04
Information query
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