Invention Grant
- Patent Title: Process for forming PZT or PLZT thinfilms with low defectivity
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Application No.: US14467688Application Date: 2014-08-25
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Publication No.: US10354858B2Publication Date: 2019-07-16
- Inventor: Asad Mahmood Haider , John Britton Robbins
- Applicant: Texas Instruments Incorporated
- Applicant Address: US TX Dallas
- Assignee: TEXAS INSTRUMENTS INCORPORATED
- Current Assignee: TEXAS INSTRUMENTS INCORPORATED
- Current Assignee Address: US TX Dallas
- Agent Jacqueline J. Garner; Charles A. Brill; Frank D. Cimino
- Main IPC: B05D3/12
- IPC: B05D3/12 ; H01L21/02 ; H01L21/67 ; B05D1/00 ; H01L49/02
Abstract:
Use of a non-solvent for the edge bead removal of spin-coated PZT or PLZT thinfilms, eliminates swelling of the exposed edges of the PZT or PLZT thinfilms and eliminates delamination and formation of particle defects in subsequent bake and anneal steps.
Public/Granted literature
- US20150187570A1 PROCESS FOR FORMING PZT OR PLZT THINFILMS WITH LOW DEFECTIVITY Public/Granted day:2015-07-02
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