Invention Grant
- Patent Title: Semiconductor devices including structures for reduced leakage current and method of fabricating the same
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Application No.: US15821089Application Date: 2017-11-22
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Publication No.: US10361205B2Publication Date: 2019-07-23
- Inventor: Min Hee Cho , Jun Soo Kim , Hui Jung Kim , Tae Yoon An , Satoru Yamada , Won Sok Lee , Nam Ho Jeon , Moon Young Jeong , Ki Jae Hur , Jae Ho Hong
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Samsung-ro, Yeongtong-gu, Suwon-si, Gyeonggi-do
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Samsung-ro, Yeongtong-gu, Suwon-si, Gyeonggi-do
- Agency: Muir Patent Law, PLLC
- Priority: KR10-2017-0047490 20170412
- Main IPC: H01L27/108
- IPC: H01L27/108 ; H01L27/12 ; H01L21/768 ; H01L29/423

Abstract:
A semiconductor device and a method for fabricating the same are provided. A semiconductor device having a substrate can include a lower semiconductor layer, an upper semiconductor layer on the lower semiconductor layer, and a buried insulating layer between the lower semiconductor layer and the upper semiconductor layer. A first trench can be in the upper semiconductor layer having a lowest surface above the buried insulating layer and a first conductive pattern recessed in the first trench. A second trench can be in the lower semiconductor layer, the buried insulating layer, and the upper semiconductor layer. A second conductive pattern can be in the second trench and a first source/drain region can be in the upper semiconductor layer between the first conductive pattern and the second conductive pattern.
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