- Patent Title: Integrated structures, capacitors and methods of forming capacitors
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Application No.: US15451090Application Date: 2017-03-06
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Publication No.: US10366901B2Publication Date: 2019-07-30
- Inventor: Eric Freeman , Paolo Tessariol
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Wells St. John P.S.
- Main IPC: H01L21/311
- IPC: H01L21/311 ; H01L49/02 ; H01L23/522 ; H01L27/11582

Abstract:
Some embodiments include an integrated structure having a semiconductor base and an insulative frame over the semiconductor base. The insulative frame has vertically-spaced sheets of first insulative material, and pillars of second insulative material between the vertically-spaced sheets. The first and second insulative materials are different from one another. Conductive plates are between the vertically-spaced sheets and are directly against the insulative pillars. Some embodiments include capacitors, and some embodiments include methods of forming capacitors.
Public/Granted literature
- US20180254283A1 Integrated Structures, Capacitors and Methods of Forming Capacitors Public/Granted day:2018-09-06
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