Invention Grant
- Patent Title: Stable and reliable FinFET SRAM with improved beta ratio
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Application No.: US15704598Application Date: 2017-09-14
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Publication No.: US10366996B2Publication Date: 2019-07-30
- Inventor: Robert C. Wong , Lei Zhuang , Ananthan Raghunathan
- Applicant: GLOBALFOUNDRIES INC.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Hoffman Warnick LLC
- Agent David Cain
- Main IPC: H01L27/11
- IPC: H01L27/11 ; H01L23/31 ; H01L21/56 ; H01L21/308 ; H01L21/3065 ; H01L27/02

Abstract:
Fabrication method for a semiconductor memory device and structure are provided, which includes: providing at least two mask layers over a pair of fin structures extended above a substrate, wherein a first mask layer of the at least two mask layers is orthogonal to a second mask layer of the at least two mask layers; and patterning the pair of fin structures to define a pass-gate transistor, wherein the first mask layer facilitates removing of a portion of a first fin structure of the pair of fin structures to define a first pass-gate fin portion of the pass-gate transistor, and the second mask layer protects a second fin structure of the pair of fin structures to define a second pass-gate fin portion of the pass-gate transistor.
Public/Granted literature
- US20180012895A1 STABLE AND RELIABLE FINFET SRAM WITH IMPROVED BETA RATIO Public/Granted day:2018-01-11
Information query
IPC分类: