Invention Grant
- Patent Title: Semiconductor device, method for manufacturing the same, or display device including the same
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Application No.: US15058832Application Date: 2016-03-02
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Publication No.: US10367095B2Publication Date: 2019-07-30
- Inventor: Junichi Koezuka , Kenichi Okazaki , Yasuharu Hosaka , Masami Jintyou , Takahiro Iguchi , Shunpei Yamazaki
- Applicant: Semiconductor Energy Laboratory Co., Ltd.
- Applicant Address: JP Atsugi-shi, Kanagawa-ken
- Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee Address: JP Atsugi-shi, Kanagawa-ken
- Agency: Fish & Richardson P.C.
- Priority: JP2015-040981 20150303; JP2015-052903 20150317; JP2015-127835 20150625; JP2015-239875 20151209
- Main IPC: H01L29/10
- IPC: H01L29/10 ; H01L29/786 ; H01L21/02 ; H01L27/12 ; H01L29/04 ; H01L29/24 ; H01L29/66

Abstract:
To suppress a change in electrical characteristics in a transistor including an oxide semiconductor film. The transistor includes a first gate electrode, a first insulating film, an oxide semiconductor film, a source electrode, a drain electrode, a second insulating film, a second gate electrode, and a third insulating film. The oxide semiconductor film includes a first oxide semiconductor film on the first gate electrode side, and a second oxide semiconductor film over the first oxide semiconductor film. The first oxide semiconductor film and the second oxide semiconductor film include In, M, and Zn (M is Al, Ga, Y, or Sn). In a region of the second oxide semiconductor film, the number of atoms of In is smaller than that in the first oxide semiconductor film. The second gate electrode includes at least one metal element included in the oxide semiconductor film.
Public/Granted literature
- US20160260837A1 SEMICONDUCTOR DEVICE, METHOD FOR MANUFACTURING THE SAME, OR DISPLAY DEVICE INCLUDING THE SAME Public/Granted day:2016-09-08
Information query
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