Invention Grant
- Patent Title: Quantifying and reducing total measurement uncertainty
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Application No.: US15299616Application Date: 2016-10-21
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Publication No.: US10372114B2Publication Date: 2019-08-06
- Inventor: Karen Biagini , Bryant Stanford Mantiply , Ravichander Jayantha Rao , Gary Taan
- Applicant: KLA-Tencor Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Hodgson Russ LLP
- Main IPC: G05B19/418
- IPC: G05B19/418 ; H01L21/67 ; H01L21/66
Abstract:
A process control technique uses production data from multiple manufacturing tools and multiple inspection or metrology tools. Total measurement uncertainty (TMU) can be calculated on the production data, which can include measurements of one or more devices manufactured using the manufacturing tools. Manufacturing steps can be ranked or otherwise compared by TMU. All production modes and recipes can be continually monitored using production data.
Public/Granted literature
- US20180113441A1 Quantifying and Reducing Total Measurement Uncertainty Public/Granted day:2018-04-26
Information query
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