Invention Grant
- Patent Title: Transistor fin formation via cladding on sacrificial core
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Application No.: US15576393Application Date: 2015-06-26
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Publication No.: US10373977B2Publication Date: 2019-08-06
- Inventor: Glenn A. Glass , Anand S. Murthy , Daniel B. Aubertine , Tahir Ghani , Jack T. Kavalieros , Benjamin Chu-Kung , Chandra S. Mohapatra , Karthik Jambunathan , Gilbert Dewey , Willy Rachmady
- Applicant: INTEL CORPORATION
- Applicant Address: US CA Santa Clara
- Assignee: INTEL CORPORATION
- Current Assignee: INTEL CORPORATION
- Current Assignee Address: US CA Santa Clara
- Agency: Finch & Maloney PLLC
- International Application: PCT/US2015/037921 WO 20150626
- International Announcement: WO2016/209253 WO 20161229
- Main IPC: H01L27/12
- IPC: H01L27/12 ; H01L29/78 ; H01L21/84 ; H01L29/66 ; H01L21/762 ; H01L29/06 ; H01L29/161 ; H01L29/20

Abstract:
Techniques are disclosed for customization of fin-based transistor devices to provide a diverse range of channel configurations and/or material systems, and within the same integrated circuit die. In accordance with an embodiment, sacrificial fins are cladded and then removed thereby leaving the cladding layer as a pair of standalone fins. Once the sacrificial fin areas are filled back in with a suitable insulator, the resulting structure is fin-on-insulator. The new fins can be configured with any materials by using such a cladding-on-core approach. The resulting fin-on-insulator structure is favorable, for instance, for good gate control while eliminating or otherwise reducing sub-channel source-to-drain (or drain-to-source) leakage current. In addition, parasitic capacitance from channel-to-substrate is significantly reduced. The sacrificial fins can be thought of as cores and can be implemented, for example, with material native to the substrate or a replacement material that enables low-defect exotic cladding materials combinations.
Public/Granted literature
- US20180158841A1 TRANSISTOR FIN FORMATION VIA CLADDING ON SACRIFICAL CORE Public/Granted day:2018-06-07
Information query
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