- 专利标题： Substrate conveying robot and substrate processing system with pair of blade members arranged in position out of vertical direction
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申请号： US14840593申请日： 2015-08-31
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公开(公告)号： US10381257B2公开(公告)日： 2019-08-13
- 发明人: Mark Tang , Eric Chan , Shigeki Ono , Shinya Kitano , Ming Zeng , Hirohiko Goto
- 申请人： KAWASAKI JUKOGYO KABUSHIKI KAISHA , KAWASAKI ROBOTICS (USA), INC.
- 申请人地址： JP Kobe-shi US MI Wixom
- 专利权人： KAWASAKI JUKOGYO KABUSHIKI KAISHA,KAWASAKI ROBOTICS (USA), INC.
- 当前专利权人： KAWASAKI JUKOGYO KABUSHIKI KAISHA,KAWASAKI ROBOTICS (USA), INC.
- 当前专利权人地址： JP Kobe-shi US MI Wixom
- 代理机构： Oliff PLC
- 主分类号： B25J9/04
- IPC分类号： B25J9/04 ; H01L21/687 ; H01L21/677
摘要：
A control unit of a substrate conveying robot makes a robot arm and a substrate holding device execute a blade member advancing operation, a substrate receiving operation, and a substrate placing operation. The substrate holding device is configured to be capable of being switched between a first working state that a pair of blade members are arranged in the vertical direction and a second working state that a pair of blade members are arranged in a position out of the vertical direction and a single blade member can be advanced into a substrate placing structure.
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