公开(公告)号：US10381257B2

公开(公告)日：2019-08-13

申请号：US14840593

申请日：2015-08-31

申请人： KAWASAKI JUKOGYO KABUSHIKI KAISHA ,  KAWASAKI ROBOTICS (USA), INC.

发明人： Mark Tang ,  Eric Chan ,  Shigeki Ono ,  Shinya Kitano ,  Ming Zeng ,  Hirohiko Goto

IPC分类号： B25J9/04 ,  H01L21/687 ,  H01L21/677

摘要： A control unit of a substrate conveying robot makes a robot arm and a substrate holding device execute a blade member advancing operation, a substrate receiving operation, and a substrate placing operation. The substrate holding device is configured to be capable of being switched between a first working state that a pair of blade members are arranged in the vertical direction and a second working state that a pair of blade members are arranged in a position out of the vertical direction and a single blade member can be advanced into a substrate placing structure.

公开(公告)号：US10953539B2

公开(公告)日：2021-03-23

申请号：US16233314

申请日：2018-12-27

申请人： KAWASAKI JUKOGYO KABUSHIKI KAISHA ,  KAWASAKI ROBOTICS (USA), INC.

发明人： Masaya Yoshida ,  Hajime Nakahara ,  Mark Tang

IPC分类号： B25J9/16 ,  H01L21/67 ,  H01L21/68 ,  H01L21/677 ,  H01L21/687 ,  B65G47/90 ,  G05B19/425

摘要： A substrate transfer robot, first and second sensors are provided in a hand such that a planar-view intersection point of optical axes is located on a center of a substrate when the hand holds the substrate in planar view, and a control device operates an arm, scans a target placed at a teaching position with the first and second sensors, and acquires the teaching position when the target is located at the planar-view intersection point of the optical axes.