Invention Grant
- Patent Title: Dense vertical field effect transistor structure
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Application No.: US15868488Application Date: 2018-01-11
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Publication No.: US10381355B2Publication Date: 2019-08-13
- Inventor: Peng Xu , Kangguo Cheng , Zhenxing Bi , Juntao Li
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Agent Vazken Alexanian
- Main IPC: H01L27/11
- IPC: H01L27/11 ; H01L29/66 ; H01L29/78 ; H01L21/8238

Abstract:
A configuration of components formed on a semiconductor structure is provided. A non-limiting example of the configuration includes a substrate having a first section doped with a first dopant and a second section doped with a second dopant. The configuration further includes an insulator interposed between the first and second sections. A first fin extends upwardly from the first section, and second and third fins extend upwardly from the second section. A conductor is configured to be shared between proximal gates operably interposed between the first and second fins. A dielectric material is configured to separate proximal gates operably interposed between the second and third fins.
Public/Granted literature
- US20190214392A1 DENSE VERTICAL FIELD EFFECT TRANSISTOR STRUCTURE Public/Granted day:2019-07-11
Information query
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