Invention Grant
- Patent Title: Transistors with H-shaped or U-shaped channels and method for forming the same
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Application No.: US15865973Application Date: 2018-01-09
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Publication No.: US10381459B2Publication Date: 2019-08-13
- Inventor: Ruilong Xie , Julien Frougier , Yi Qi , Nigel G. Cave , Edward J. Nowak , Andreas Knorr
- Applicant: GLOBALFOUNDRIES INC.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Hoffman Warnick LLC
- Agent Anthony Canale
- Main IPC: H01L21/44
- IPC: H01L21/44 ; H01L29/66 ; H01L29/10 ; H01L21/02 ; H01L21/308 ; H01L29/161 ; H01L29/06 ; H01L29/78

Abstract:
A semiconductor structure including a first substantially U-shaped and/or H-shaped channel is disclosed. The semiconductor structure may further include a second substantially U-shaped and/or H-shaped channel positioned above the first channel. A method of forming a substantially U-shaped and/or H-shaped channel is also disclosed. The method may include forming a fin structure on a substrate where the fin structure includes an alternating layers of sacrificial semiconductor and at least one silicon layer or region. The method may further include forming additional silicon regions vertically on sidewalls of the fin structure. The additional silicon regions may contact the silicon layer or region of the fin structure to form the substantially U-shaped and/or H-shaped channel(s). The method may further include removing the sacrificial semiconductor layers and forming a gate structure around the substantially U-shaped and/or substantially H-shaped channels.
Public/Granted literature
- US20190214482A1 TRANSISTORS WITH H-SHAPED OR U-SHAPED CHANNELS AND METHOD FOR FORMING THE SAME Public/Granted day:2019-07-11
Information query
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