Invention Grant
- Patent Title: Advanced layered bulk ceramics via field assisted sintering technology
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Application No.: US14712059Application Date: 2015-05-14
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Publication No.: US10385459B2Publication Date: 2019-08-20
- Inventor: Jennifer Y. Sun , Yikai Chen , Biraja Prasad Kanungo
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Lowenstein Sandler LLP
- Main IPC: C04B35/622
- IPC: C04B35/622 ; B32B9/04 ; C04B35/505 ; C23C24/10 ; B32B37/06 ; C23C28/04 ; B32B18/00
Abstract:
Disclosed herein are methods for fabricating layered ceramic materials via field assisted sintering technology. A method includes forming a ceramic green body on a surface of a substrate, and sintering the ceramic green body using a field-assisted sintering process to form a ceramic layer joined to the substrate.
Public/Granted literature
- US20150329430A1 ADVANCED LAYERED BULK CERAMICS VIA FIELD ASSISTED SINTERING TECHNOLOGY Public/Granted day:2015-11-19
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