Invention Grant
- Patent Title: Reflected light detecting device and reflected light detecting method
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Application No.: US15597544Application Date: 2017-05-17
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Publication No.: US10386236B2Publication Date: 2019-08-20
- Inventor: Hiroki Hayashi , Ichiro Ishimaru
- Applicant: NATIONAL UNIVERSITY CORPORATION KAGAWA UNIVERSITY
- Applicant Address: JP Takamatsu-shi
- Assignee: NATIONAL UNIVERSITY CORPORATION KAGAWA UNIVERSITY
- Current Assignee: NATIONAL UNIVERSITY CORPORATION KAGAWA UNIVERSITY
- Current Assignee Address: JP Takamatsu-shi
- Agency: Oliff PLC
- Priority: JP2016-101747 20160520
- Main IPC: G01B9/02
- IPC: G01B9/02 ; G01J3/447 ; G01J3/02 ; G01J3/45 ; G01J3/50 ; G01N21/21 ; G01N21/25 ; G01N21/55

Abstract:
Reflected light detecting device and method with surface reflected light components collectively be extracted/removed when detecting reflected light arising in casting light onto target-object range having non-planar surface. The device includes: a first illuminating device causing first-measurement light in predetermined polarization direction to enter target-object first region from first direction; polarization optical system position part of first-surface reflected light enters the polarization optical system, the first-surface reflected light being the first-measurement in the first region surface; a second illuminating device causing second-measurement light in the same first-measurement light polarization direction to enter second region from second direction, the second region being on the target-object surface, different from the first region; adjusting direction of the second-measurement light optical axis so part of second-surface reflected light enters the polarization optical system, the second-surface reflected light being the second-measurement in second region surface; and detecting light having passed through the polarization optical system.
Public/Granted literature
- US20170336263A1 REFLECTED LIGHT DETECTING DEVICE AND REFLECTED LIGHT DETECTING METHOD Public/Granted day:2017-11-23
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