Abstract:
A spectrometry device wherein light rays emitted from an object face measurement point combine into one parallel light beam by an objective lens, this is divided into a first and second light beam by a phase shifter, and the first and second light beam emit toward a light-receiving face of a photodetector while providing an optical path length difference. A light-shielding plate is arranged on a face optically conjugate the object face respective to the objective lens, and only light passed through translucent portions of the light-shielding plate is directed to the objective lens. A lateral length of each light-shielding plate translucent portion and the interval between two adjacent translucent portions are based on the objective lens focal length, the distance from the phase shifter to the photodetector light-receiving face, a photodetector pixel pitch, a pixel length, and a predetermined wavelength range of the light emitted from the measurement point.
Abstract:
Optical measuring apparatus includes: a light source irradiating an object to be measured; a splitter splitting transmitted light or reflected light from the object to be measured; a phase changer changing a phase of a first light which is one of the lights split; a phase fixer maintaining a phase of a second light which is the other light split; a multiplexer multiplexing lights output from the phase changer and the phase fixer; a detector detecting the light (interference image) output from the multiplexer; and a controller that extracts a reference point from the interference image, when a displacement of the reference point is detected, corrects a luminance value for each pixel of the interference images in accordance with a displacement of the object to be measured indicated by a displacement of the reference point, constructs an interferogram based on the luminance value for each pixel of the interference images after the correction.
Abstract:
Reflected light detecting device and method with surface reflected light components collectively be extracted/removed when detecting reflected light arising in casting light onto target-object range having non-planar surface. The device includes: a first illuminating device causing first-measurement light in predetermined polarization direction to enter target-object first region from first direction; polarization optical system position part of first-surface reflected light enters the polarization optical system, the first-surface reflected light being the first-measurement in the first region surface; a second illuminating device causing second-measurement light in the same first-measurement light polarization direction to enter second region from second direction, the second region being on the target-object surface, different from the first region; adjusting direction of the second-measurement light optical axis so part of second-surface reflected light enters the polarization optical system, the second-surface reflected light being the second-measurement in second region surface; and detecting light having passed through the polarization optical system.
Abstract:
A spectroscopic measurement device includes: a dividing optical system for dividing a measurement beam emitted from each of a plurality of measurement points located within a measurement area of an object to be measured, into a first measurement beam and a second measurement beam; an imaging optical system; an optical path length difference providing means; a detector including a plurality of pixels; a processor for acquiring an interferogram of a measurement point of the object to be measured; a conjugate plane imaging optical system located between the object to be measured and the dividing optical system; and a periodicity providing means located on the conjugate plane.
Abstract:
A spectroscopic measurement device includes a dark filter that is arranged on an optical path between an imaging optical system and a light detection unit and includes a plurality of regions having different transmittances, the filter being configured such that a fixed reflected measurement light and a movable reflected measurement light that are guided to a same point by the imaging optical system and form interference light are transmitted through a same region; and an arithmetic processing unit that obtains an interferogram of the measurement light at a transmittance corresponding to each of two or more regions from a detection signal of each pixel of a light detection unit when a movable reflection unit is moved, and obtains a spectrum of the measurement light based on the interferogram.
Abstract:
A spectroscopic measurement device includes a dark filter that is arranged on an optical path between an imaging optical system and a light detection unit and includes a plurality of regions having different transmittances, the filter being configured such that a fixed reflected measurement light and a movable reflected measurement light that are guided to a same point by the imaging optical system and form interference light are transmitted through a same region; and an arithmetic processing unit that obtains an interferogram of the measurement light at a transmittance corresponding to each of two or more regions from a detection signal of each pixel of a light detection unit when a movable reflection unit is moved, and obtains a spectrum of the measurement light based on the interferogram.
Abstract:
The present invention causes measurement light, emitted from an object and to be measured, to enter a fixed mirror and a movable mirror forming interfering light between the measurement light reflected by the fixed mirror and measurement light reflected by the movable mirror. Change to the intensity of the interference light of measurement light is obtained by moving the movable mirror unit, acquiring the interferogram of measurement light. Reference light of a narrow wavelength band included in a wavelength band of the measurement light enters the fixed mirror and the movable mirror, forming interference light of the reference light. The movable mirror is moved to correct the interferogram of measurement light, which is at the same wavelength as the reference light in the measurement light, and the reference light, and a spectrum of the measurement light is acquired based on the corrected interferogram.
Abstract:
The present invention causes measurement light, emitted from an object and to be measured, to enter a fixed mirror and a movable mirror forming interfering light between the measurement light reflected by the fixed mirror and measurement light reflected by the movable mirror. Change to the intensity of the interference light of measurement light is obtained by moving the movable mirror unit, acquiring the interferogram of measurement light. Reference light of a narrow wavelength band included in a wavelength band of the measurement light enters the fixed mirror and the movable mirror, forming interference light of the reference light. The movable mirror is moved to correct the interferogram of measurement light, which is at the same wavelength as the reference light in the measurement light, and the reference light, and a spectrum of the measurement light is acquired based on the corrected interferogram.
Abstract:
A spectral measurement device to detect measurement light including light emitted from a measurement object and to measure spectral characteristic of the light, including: a spectral optical system to disperse the measurement light; a detection unit to detect intensity of light dispersed by the spectral optical system; a spectral characteristic acquisition unit to acquire a measurement light spectral characteristic indicating a relationship between a light intensity and a wavelength of the measurement light on a basis of a detection result; a storage unit to store spectral characteristic information on possible background light, the information indicating a spectral characteristic of the possible background light, which involves a spectral sensitivity characteristic of the detection unit; and a processing unit to obtain a spectral characteristic of background light emitted from the ambience of the measurement object, from the measurement light spectral characteristic and the spectral characteristic information on the possible background light.
Abstract:
A light source, a standing wave forming unit, a detector, and an absorbance calculating unit. The light source irradiates a sample with light. The standing wave forming unit forms, in the sample, an acoustic standing wave perpendicular to a surface of the sample. A node of the acoustic standing wave is positioned at a predetermined distance from the surface of the sample, the light from the light source entering the surface of the sample. The detector detects light emitted from the surface of the sample, and is disposed on the surface of the sample on a side where the light source is disposed. The absorbance calculating unit obtains absorbance.